Product Information
Pellicle inspection Machine
Pellicle inspection Machine
This machine automatically inspects and removes foreign matter adhering to the pellicle using an optical camera.
Application
Inspection and removal of pellicles
Characteristics
- SMIF
- Conpact case correspondance
- Automatic inspection using various camera.
- Visible inspection after inspection is possible
- Automatic removal of particles by N2 brow.
Machine specification
- Machine dimensions
- 2500D×33500W×2800H
- Power supply
- AC208V Φ3 60Hz 50KVA
- CDA
- 20L/min
- N2
- 100L/min
- Vacuum
- 20NL/min -80kPa
- Exhaust
- 20m3/min