- Grinder / Polisher
Grinder / polisher which enable high integration and capacity of the silicon wafers.
- Photo-fabrication Machine
This machine is for fabricating complex, fine shape on a substrate in optical technology and chemical technology.
- Precision Printing Equipment
This machine is for forming an electronic circuit on various substrates utilized printing techniques.
- Inspection Machine
This machine is for auto inspection of defects such as scratches, chippings and uneven on a silicon wafer and glass substrate for FPD.
This machine is for automated / labor saving of manufacturing process of silicon wafer and FPD glass substrate.
- Environment-Related Machines
The machines are in consideration of environment for recovering wastewater, reuse of each manufacturing processes and UFB (ultra-fine bubble).