Product Information
Coater
Spin Coater
This machine is for coating materials such as resist and PI on substrate by high-speed rotation
Application
Photoresist coating
Insulating film (such as polyimide) coating
High viscosity material application (800cps 1000cps 2000cps)
Characteristics
- It corresponds to large size.(Gen. 6, 8, 10 Photomasks)
- It is adaptable to high-viscosity material.