Wafer defect inspection Machine（Visual inspection machine）

Inspection Machine of Chemical Wafer Defect

Application

Object wafer size：6～12inch
It can install 15 cassettes at loader side, 21 cassettes at unloader side.
NG products are accommodated to the specified NG cassette in accordance with the type of NG.

Characteristics

It automatically inspects pinhole, crack, scratch and chipping of the wafer by edge inspection, transmission inspection, bright-field inspection and dark-field inspection.
Tact：approximately 20sec/1 wafer(cycle time)