High Resolution Inspection machine MEI Series
Reticle / Pellicle / Blanks inspection MEI-S30-A2

This machine automatically inspects and removes foreign matter adhering to the pellicle using an optical camera.

Characteristics

Inspection across the entire reticle surface

　(Pellicle, Pellicalized Masks, Blanks, Backside)
　・Particle / Pinhole/Damage/Wrinkle inspection
　・Adjustable inspection area
　・Equipped review module using a color microscope

High-speed multi-scan using specialized optics

Detected particles can be visualized

Flexible recipe operation

High repetitive accuracy

High measurement repeatability from machine to machine

Applicable to full automation (EFEM/OHT/Multi-port transportation)

Foreign particle removal function via N2 blow possible

　(Automatic / Manual air blow)

Machine specification