Defect inspection equipment

Inspection equipment for FPD Substrate Glass and Flexible Device.

Application

Object substrate size
Min　100mm×100mm
Max　200mm×300mm

Characteristics

It can inspect defects of scratch, cracking, chipping, non-uniformity of the coating film and particles of surface of the glass and flexible film.
It corresponds to both the reflection system and transmission system.
It can be detected in a range of resolution from 2um to 400um.
It can also measure the thickness of the coating film on the substrate.: ※Method : Spectral interference method