Product Information
Polishing machine
Fully Automatic CMP Machine (MGP808XJ)
The fully automated CMP machine was developed as a successor to LGP-808XJ manufactured by Lap Master SFT. We adapt new heads which we developed, and it has been achieved to improve GBIR and SFQR of wafer's surface which is increasing year by year.
Application
Polish along the shape formed in the previous process.
Characteristics
- Achieve high throughput with a total of 8 axes of polishing heads and 3 tables
- Edge clamping system is adopted for the robot hand to be transported.
- Unloaders can be dried out by joining with cleaning machines
※Wet-out by wet cart can also be selected.
Machine specification
- Machine dimensions
- 2500D×3350W×2800H
- Power supply
- AC200/AC220V Φ3 50/60Hz 70KVA
- DIW
- 20L/min
- CDA
- 100L/min
- N2
- 30L/min
- Exhaust
- 4Nm3/min
- Wastewater
- 20L/min
- Slurry drainage
- 20L/min